Chemical Resistance
These screws are suitable for use in corrosive environments that use wafer cleaning solutions and process gases.
Special materials and coatings prevent chemical corrosion and dissolution.
Preventing corrosion reduces maintenance and equipment damage.
＊1 ：INCONEL is a registered trademark of Special Metals Corporation.
＊2 ：MONEL is a registered trademark of Special Metals Corporation.
＊3 ：Hastelloy is a registered trademark of Haynes International, Inc.
＊4 ：MAT21 is a registered trademark of Proterial, Ltd.
＊5 ：RENYTM is a trademark of GLOBAL POLYACETAL CO., LTD.
＊6 ：VESPEL is a registered trademark of DuPont.
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Hex Socket Head Cap Screws (Tantalum) | Hex Socket Head Cap Screws (MAT21) | Hex Socket Head Cap Screws with Ventilation Hole - High Intensity Stainless Steel | Socket Head Cap Screw - Low Profile - SUS316L | Hex Socket Head Cap Screws - High Intensity S.S. |
| Part Number | SNSTA | SNSMT | SVSLG | SLHL | SNSX-88 |
| Feature | Chemical Resistance | Chemical Resistance | High Strength(Equivalent to Strength Class 10.8) | Low Profile Small Space | High Strength HeatResistance Corrosion Resistance Nonmagnetic |
| Material | Tantalum | MAT21 | SUS316L | SUS316L | SUS316L HiMo |
| Surface Treatment | - | - | - | - | - |
| Thread Size | M3 ～ M6 | M3 ～ M8 | M3 ～ M6 | M3 ～ M6 | M3 ～ M8 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SNSTA-M3 SNSTA-M4 SNSTA-M5 SNSTA-M6 | SNSMT-M3 SNSMT-M4 SNSMT-M5 SNSMT-M6 SNSMT-M8 | SVSLG-M3 SVSLG-M4 SVSLG-M5 SVSLG-M6 | SLHL-M3 SLHL-M4 SLHL-M5 SLHL-M6 | SNSX-M3-88 SNSX-M4-88 SNSX-M5-88 SNSX-M6-88 SNSX-M8-88 |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Hex Socket Head Cap Screws - High Intensity S.S. | Hex Socket Head Cap Screws - High Intensity Stainless Steel | Washer Integrated Hex Socket Head Cap Screws with Ventilation Hole - High Strength Stainless Steel | Washer Integrated Hex Socket Head Cap Screws - High Strength Stainless Steel | Hex Socket Head Cap Screws (SUS316L) |
| Part Number | SNSX-109 | SNSLG | SVSQLG | SNSQLG | SNSL |
| Feature | High Strength HeatResistance Corrosion Resistance Nonmagnetic | High Strength (Tensile Strength Ranking 10.8 Equivalent) Heat Resistance Corrosion Resistance Nonmagnetic | High Strength (Tensile Strength Ranking 10.8 Equivalent) Integrated Washers I=3 | High Strength (Tensile Strength Ranking 10.8 Equivalent) Heat Resistance Corrosion Resistance Nonmagnetic Integrated Washers I=3 | Heat Resistance Corrosion Resistance Nonmagnetic |
| Material | SUS316L HiMo | SUS316L | SUS316L | SUS316L | SUS316L |
| Surface Treatment | - | - | - | - | - |
| Thread Size | M6 ～ M12 | M3 ～ M6 | M3 ～ M6 | M3 ～ M6 | M2 ～ M8 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SNSX-M10-109 SNSX-M12-109 SNSX-M6-109 SNSX-M8-109 | SNSLG-M3 SNSLG-M4 SNSLG-M5 SNSLG-M6 | SVSQLG-M3 SVSQLG-M4 SVSQLG-M5 SVSQLG-M6 | SNSQLG-M3 SNSQLG-M4 SNSQLG-M5 SNSQLG-M6 | SNSL-M2 SNSL-M2.5 SNSL-M3 SNSL-M4 SNSL-M5 SNSL-M6 SNSL-M8 |
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|---|---|---|---|---|---|
| Part Name | Hex Socket Head Cap Screws - PTFE Coating | Socket Head Cap Captive Screws - Low Temperature Black Chrome Treatment | Socket Head Cap Captive Screws - PTFE Coating | Hex Nut - SUS310S | Washer - SUS310S |
| Part Number | SNSS-TF | SSC-RY | SSC-TF | SHNJ | SWAJ-F |
| Feature | Chemical Resistance Seizing Prevention | Chemical Resistance Anti-reflection Seizing Prevention Captive/Loss Prevention | Chemical Resistance Seizing Prevention Captive/Loss Prevention | Heat Resistance Chemical Resistance | Heat Resistance Chemical Resistance |
| Material | SUSXM7 (Equivalent to SUS304) | SUSXM7 (Equivalent to SUS304) | SUSXM7 (Equivalent to SUS304) | SUS310S | SUS310S |
| Surface Treatment | PTFE coating | Low temperature black chrome treatment | PTFE coating | - | - |
| Thread Size | M3 ～ M10 | M3 ～ M8 | M3 ～ M8 | M3 ～ M10 | M3 ～ M10 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SNSS-M10-TF SNSS-M3-TF SNSS-M4-TF SNSS-M5-TF SNSS-M6-TF SNSS-M8-TF | SSC-M3-RY SSC-M4-RY SSC-M5-RY SSC-M6-RY SSC-M8-RY | SSC-M3-TF SSC-M4-TF SSC-M5-TF SSC-M6-TF SSC-M8-TF | SHNJ-M10 SHNJ-M3 SHNJ-M4 SHNJ-M5 SHNJ-M6 SHNJ-M8 | SWAJ-10-F SWAJ-3-F SWAJ-4-F SWAJ-5-F SWAJ-6-F SWAJ-8-F |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Socket Head Cap Captive Screws - High Intensity Titanium | Socket Head Cap Captive Screws - Titanium | Cross Recessed Pan Head Machine Screws - High Intensity Titanium Alloy | Cross Recessed Pan Head Machine Screws - Titanium | Titanium Pan Head Machine Screws for Precision Instruments (Miniature Screws) |
| Part Number | SSC-SNSTG | SSC-SNST | SNPTG | SNPT | SNZT |
| Feature | High Strength Lightweight Non-magnetic Corrosion Resistance Captive/Loss Prevention | Lightweight Non-magnetic Chemical Resistance Captive/Loss Prevention | High Strength Lightweight Nonmagnetic Corrosion Resistance | Lightweight Nonmagnetic Chemical Resistance | Lightweight Nonmagnetic Chemical Resistance |
| Material | Grade 5 Titanium | Grade 2 Titanium | β Titanium | Grade 2 Titanium | Grade 2 Titanium |
| Surface Treatment | - | Special Chemical Polishing | Special Chemical Polishing | Special Chemical Polishing | - |
| Thread Size | M3 ～ M8 | M3 ～ M6 | M3 ～ M5 | M2 ～ M5 | M1.6 ～ M2.5 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SSC-SNSTG-M3 SSC-SNSTG-M4 SSC-SNSTG-M5 SSC-SNSTG-M6 SSC-SNSTG-M8 | SSC-SNST-M3 SSC-SNST-M4 SSC-SNST-M5 SSC-SNST-M6 | SNPTG-M3 SNPTG-M4 SNPTG-M5 | SNPT-M2 SNPT-M2.5 SNPT-M3 SNPT-M4 SNPT-M5 | SNZT-M1.6 SNZT-M2 SNZT-M2.5 |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Cross Recessed Flat Head Machine Screws - High Intensity Titanium Alloy | Cross Recessed Flat Head Machine Screws - Titanium | Hex Nuts / Hex Flange Nuts - Titanium | Hex Nuts / Hex Flange Nuts - Titanium | Hex Lock Nuts - Titanium |
| Part Number | SNFTG | SNFT | SHNT | SHNT-F | SWUT |
| Feature | High Strength Lightweight Nonmagnetic Corrosion Resistance | Lightweight Nonmagnetic Chemical Resistance | Lightweight Nonmagnetic Chemical Resistance | Lightweight Nonmagnetic Chemical Resistance With Flange | Lightweight Nonmagnetic Vibration Resistant |
| Material | β Titanium | Grade 2 Titanium | Grade 2 Titanium | Grade 2 Titanium | Grade 2 Titanium |
| Surface Treatment | Special Chemical Polishing | Special Chemical Polishing | Special Chemical Polishing | Special Chemical Polishing | Special Chemical Polishing |
| Thread Size | M3 ～ M5 | M3 ～ M4 | M3 ～ M10 | M3 ～ M10 | M3 ～ M10 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SNFTG-M3 SNFTG-M4 SNFTG-M5 | SNFT-M3 SNFT-M4 | SHNT-M10 SHNT-M3 SHNT-M4 SHNT-M5 SHNT-M6 SHNT-M8 | SHNT-M10-F SHNT-M3-F SHNT-M4-F SHNT-M5-F SHNT-M6-F SHNT-M8-F | SWUT-M10 SWUT-M3 SWUT-M4 SWUT-M5 SWUT-M6 SWUT-M8 |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Washers - Titanium | Washers - Titanium | Socket Head Cap Screw -Inconel equiv. | Hex Socket Head Cap Screws (Inconel equiv.) with Ventilation Hole | Inconel Hex Nut |
| Part Number | SWAT-F | SWAT-S | SNSI | SVSI | SHNI |
| Feature | Lightweight Nonmagnetic Chemical Resistance | Lightweight Nonmagnetic Chemical Resistance | Chemical Resistance Heat Resistance | Chemical Resistance Heat Resistance | Chemical Resistance Heat Resistance |
| Material | Grade 2 Titanium | Grade 2 Titanium | Inconel equiv. | Inconel equiv. | Inconel equiv. |
| Surface Treatment | - | - | - | - | - |
| Thread Size | M3 ～ M10 | M3 ～ M10 | M3 ～ M8 | M3 ～ M8 | M3 ～ M8 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SWAT-10-F SWAT-3-F SWAT-4-F SWAT-5-F SWAT-6-F SWAT-8-F | SWAT-10-S SWAT-3-S SWAT-4-S SWAT-5-S SWAT-6-S SWAT-8-S | SNSI-M3 SNSI-M4 SNSI-M5 SNSI-M6 SNSI-M8 | SVSI-M3 SVSI-M4 SVSI-M5 SVSI-M6 SVSI-M8 | SHNI-M3 SHNI-M4 SHNI-M5 SHNI-M6 SHNI-M8 |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Hex Socket Head Cap Screws with Special Low Profile (Hastelloy C-22 equiv.) | Hex Socket Head Cap Screws - Nickel | Hex Socket Head Cap Screws (Monel 400 equiv.) | Duplex Stainless Steel Hexagon Head Screw | Duplex Stainless Steel Hexagon Nuts |
| Part Number | SSHH-C22 | SNSN | SNSMN | SNHDS | SHNDS |
| Feature | Chemical Resistance Special Low Profile Space-saving | Chemical Resistance Heat Resistance | Chemical-proof Heat-resistance | High Strength CorrosionResistance Magnetic | High Strength CorrosionResistance Magnetic |
| Material | Hastelloy equiv. | Pure Nickel (Ni 99.0%) | Monel equiv. | - | - |
| Surface Treatment | - | - | - | - | - |
| Thread Size | M2 ～ M5 | M3 ～ M8 | M3 ～ M6 | M12 ～ M24 | M12 ～ M24 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SSHH-M2.5-C22 SSHH-M2-C22 SSHH-M3-C22 SSHH-M4-C22 SSHH-M5-C22 | SNSN-M3 SNSN-M4 SNSN-M5 SNSN-M6 SNSN-M8 | SNSMN-M3 SNSMN-M4 SNSMN-M5 SNSMN-M6 | SNHDS-M12 SNHDS-M16 SNHDS-M20 SNHDS-M24 | SHNDS-M12 SHNDS-M16 SHNDS-M20 SHNDS-M24 |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Slotted Cheese Head Machine Screws (Pure Tungsten) | Slotted Cheese Head Machine Screws (Silicon Carbide) | Ceramic Hex Socket Head Cap Bolts | Ceramic Hex Head Bolts | Hex Nuts - Ceramic |
| Part Number | SNCW | SICX-SX | SCX-C | SCX-H | SCX-N |
| Feature | Chemical Resistance | Chemical Resistance Heat Resistance | Chemical Resistance Heat Resistance Electrical Insulation | Chemical Resistance Heat Resistance Electrical Insulation | Chemical Resistance Heat Resistance Electrical Insulation |
| Material | Tungsten | Silicon Carbide (SiC) | Al2O3 (Alumina 99.5%) | Al2O3 (Alumina 99.5%) | Al2O3 (Alumina 99.5%) |
| Surface Treatment | - | - | - | - | - |
| Thread Size | M3 ～ M6 | M3 ～ M5 | M3 ～ M10 | M3 ～ M10 | M3 ～ M10 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SNCW-M3 SNCW-M4 SNCW-M5 SNCW-M6 | SICX-M3-SX SICX-M4-SX SICX-M5-SX | SCX-M10-C SCX-M3-C SCX-M4-C SCX-M5-C SCX-M6-C SCX-M8-C | SCX-M10-H SCX-M3-H SCX-M4-H SCX-M5-H SCX-M6-H SCX-M8-H | SCX-M10-N SCX-M3-N SCX-M4-N SCX-M5-N SCX-M6-N SCX-M8-N |
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| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Plastic Screw - Hex Head Screws - PTFE | Plastic Screw - Hex Nuts / Washers - PTFE | Plastic Screw - Hex Nuts / Washers - PTFE | Plastic Screws - Hex Head Screws - PFA | Plastic Screws - Hex Nuts - PFA |
| Part Number | SPT-H | SPT-N | SPT-W | SPFA-H | SPFA-N |
| Feature | Chemical Resistance Heat Resistance Electrical Insulation | Chemical Resistance Heat Resistance Electrical Insulation | Chemical Resistance Heat Resistance Electrical Insulation | Chemical Resistance Heat Resistance | Chemical Resistance Heat Resistance |
| Material | PTFE (Polytetrafluoroethylene) | PTFE (Polytetrafluoroethylene) | PTFE (Polytetrafluoroethylene) | Perfluoroalkoxy Alkane | Perfluoroalkoxy Alkane |
| Surface Treatment | - | - | - | - | - |
| Thread Size | M3 ～ M12 | M3 ～ M12 | M3 ～ M12 | M4 ～ M8 | M4 ～ M8 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SPT-M10-H SPT-M12-H SPT-M3-H SPT-M4-H SPT-M5-H SPT-M6-H SPT-M8-H | SPT-M10-N SPT-M12-N SPT-M3-N SPT-M4-N SPT-M5-N SPT-M6-N SPT-M8-N | SPT-10-W SPT-12-W SPT-3-W SPT-4-W SPT-5-W SPT-6-W SPT-8-W | SPFA-M4-H SPFA-M5-H SPFA-M6-H SPFA-M8-H | SPFA-M4-N SPFA-M5-N SPFA-M6-N SPFA-M8-N |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Plastic Screw - Hex Head Screws - PP | Plastic Screw - Hex Nuts / Washers - PP | Plastic Screw - Hex Nuts / Washers - PP | Plastic Screws - Hex Head Screws - PVDF | Plastic Screw - Socket Head Cap Screws - PVDF |
| Part Number | SPP-H | SPP-N | SPP-W | SPV-H | SPV-C |
| Feature | Chemical Resistance | Chemical Resistance | Chemical Resistance | Chemical Resistance | Chemical Resistance |
| Material | PP | PP | PP | PVDF | PVDF |
| Surface Treatment | - | - | - | - | - |
| Thread Size | M4 ～ M12 | M4 ～ M12 | M4 ～ M12 | M4 ～ M12 | M3 ～ M12 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SPP-M10-H SPP-M12-H SPP-M4-H SPP-M5-H SPP-M6-H SPP-M8-H | SPP-M10-N SPP-M12-N SPP-M4-N SPP-M5-N SPP-M6-N SPP-M8-N | SPP-10-W SPP-12-W SPP-4-W SPP-5-W SPP-6-W SPP-8-W | SPV-M10-H SPV-M12-H SPV-M4-H SPV-M5-H SPV-M6-H SPV-M8-H | SPV-M10-C SPV-M12-C SPV-M3-C SPV-M4-C SPV-M5-C SPV-M6-C SPV-M8-C |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Plastic Screws - Hex Nuts / Washers - PVDF | Plastic Screws - Hex Nuts / Washers - PVDF | Plastic Screws - Wing Nuts - POM | Plastic Screws - Wing Bolts - POM | Plastic Screws - Domed Cap Nuts - POM |
| Part Number | SPV-N | SPV-W | SPO-YN | SPO-YB | SPO-CN |
| Feature | Chemical Resistance | Chemical Resistance | Chemical Resistance | Chemical Resistance | Chemical Resistance |
| Material | PVDF | PVDF | Polyacetal | Polyacetal | Polyacetal |
| Surface Treatment | - | - | - | - | - |
| Thread Size | M3 ～ M12 | M3 ～ M12 | M4 ～ M8 | M5 ～ M8 | M3 ～ M8 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SPV-M10-N SPV-M12-N SPV-M3-N SPV-M4-N SPV-M5-N SPV-M6-N SPV-M8-N | SPV-10-W SPV-12-W SPV-3-W SPV-4-W SPV-5-W SPV-6-W SPV-8-W | SPO-M4-YN SPO-M5-YN SPO-M6-YN SPO-M8-YN | SPO-M5-YB SPO-M6-YB SPO-M8-YB | SPO-M3-CN SPO-M4-CN SPO-M5-CN SPO-M6-CN SPO-M8-CN |
| Image |  |  |  |  |  |
|---|---|---|---|---|---|
| Part Name | Cover Caps | Cover Caps | Cover Caps - PTFE | Socket Head Cap Screws for Cover Caps | Hex Head Screws - PFA Coating for Head |
| Part Number | SCAP-AL | SCAP-CE | SCAP-PT | SNCPS | SNHS-HTF |
| Feature | Low Outgas Corrosion Resistance | Heat Resistance Chemical Resistance Electrical Insulation | Chemical Resistance | For Cover Caps | Chemical Resistance |
| Material | A5056 | Al2O3 (Alumina 99.5%) | PTFE (Polytetrafluoroethylene) | SUSXM7 (Equivalent to SUS304) | SUSXM7 (Equivalent to SUS304) |
| Surface Treatment | - | - | - | - | PFA Coating |
| Thread Size | M5 ～ M16 | M5 ～ M16 | M5 ～ M16 | M3 ～ M10 | M3 ～ M8 |
| Operating Temperature (℃) | - | - | - | - | - |
| CAD | CAD | CAD | CAD | CAD | CAD |
| Specifications | Specifications | Specifications | Specifications | Specifications | Specifications |
| List | SCAP-10-AL SCAP-3-AL SCAP-4-AL SCAP-5-AL SCAP-6-AL SCAP-8-AL | SCAP-10-CE SCAP-3-CE SCAP-4-CE SCAP-5-CE SCAP-6-CE SCAP-8-CE | SCAP-10-PT SCAP-3-PT SCAP-4-PT SCAP-5-PT SCAP-6-PT SCAP-8-PT | SNCPS-M10 SNCPS-M3 SNCPS-M4 SNCPS-M5 SNCPS-M6 SNCPS-M8 | SNHS-M3-HTF SNHS-M4-HTF SNHS-M5-HTF SNHS-M6-HTF SNHS-M8-HTF |
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