Chemical Resistance Screws
These screws are suitable for use in corrosive environments that use wafer cleaning solutions and process gases.
Special materials and coatings prevent chemical corrosion and dissolution.
Preventing corrosion reduces maintenance and equipment damage.
*1 :INCONEL is a registered trademark of Special Metals Corporation.
*2 :MONEL is a registered trademark of Special Metals Corporation.
*3 :Hastelloy is a registered trademark of Haynes International, Inc.
*4 :MAT21 is a registered trademark of Proterial, Ltd.
*5 :RENYTM is a trademark of GLOBAL POLYACETAL CO., LTD.
*6 :VESPEL is a registered trademark of DuPont.
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Part Name | Washers - Titanium | Plastic Standoff - PEEK | Plastic Set Screw - PEEK | Plastic Plug - PEEK | Cover Caps | Cover Caps - PTFE | Socket Head Cap Screws for Cover Caps | ||
Part Number | SWAT-S | SPE-HB | SPE-T | SPE-R | SCAP-CE | SCAP-PT | SNCPS | ||
Feature | Lightweight Nonmagnetic Chemical Resistance |
PEEK Chemical Resistance Heat Resistance |
Chemical Resistance Heat Resistance |
Chemical Resistance Heat Resistance |
Heat Resistance Chemical Resistance Electrical Insulation |
Chemical Resistance | For Cover Caps | ||
Material | Grade 2 Titanium | PEEK | PEEK | PEEK | Al2O3 (Alumina 99.5%) | PTFE (Polytetrafluoroethylene) | SUSXM7 (Equivalent to SUS304) | ||
Surface Treatment | - | - | - | - | - | - | - | ||
Thread Size | M3 ~ M10 | M3 ~ M8 | M3 ~ M8 | R1/8" ~ R3/8" | M5 ~ M16 | M5 ~ M16 | M3 ~ M10 | ||
Operating Temperature (℃) | - | - | - | - | - | - | - | ||
CAD | CAD | CAD | CAD | CAD | CAD | CAD | CAD | ||
Specifications | Specifications | Specifications | Specifications | Specifications | Specifications | Specifications | Specifications | ||
List | SWAT-10-S SWAT-3-S SWAT-4-S SWAT-5-S SWAT-6-S SWAT-8-S | SPE-M3-HB SPE-M4-HB SPE-M5-HB SPE-M6-HB SPE-M8-HB | SPE-M3-T SPE-M4-T SPE-M5-T SPE-M6-T SPE-M8-T | SPE-1-R SPE-2-R SPE-3-R | SCAP-10-CE SCAP-3-CE SCAP-4-CE SCAP-5-CE SCAP-6-CE SCAP-8-CE | SCAP-10-PT SCAP-3-PT SCAP-4-PT SCAP-5-PT SCAP-6-PT SCAP-8-PT | SNCPS-M10 SNCPS-M3 SNCPS-M4 SNCPS-M5 SNCPS-M6 SNCPS-M8 |
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