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  • Special Screws
  • Vented Screws, Vacuum Screws

PVFS-6

Spring Plungers with Ball with Ventilation Hole

  • Vacuum
  • Cleanroom Specification

Dimension Drawing

PVFSSpring Plungers with Ball with Ventilation Hole寸法図

Unit : mm

Part Number M s L Db B d Load(N)
min./max.
Qty per Pack Mass
(g)
CAD
Download
PVFS-6 6 1 14 3.5 3 2 6.9/13 1 1.5 -

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Material/Finish

PVFS
Main Body Equivalent to SUS304
Ball SUS440C(Hardness 55-60HRC)
Thin Fluorine Coating
Spring SUS631J1

Application

Fixing and locating workpiece, Vacuum devices, FPD production
equipment, semiconductor devices

Characteristics

  • For positioning in vacuum devices and vacuum chambers, such as FPD production equipment and semiconductor devices.
  • Cleanroom wash and cleanroom packing are completed.⇒Cleanroom Wash / Cleanroom Packing Service
  • The thin fluorine coating keeps the ball highly lubricated, even after cleanroom washing.
  • Ventilation holes and grooves easily release gas trapped in machines.

PVFSSpring Plungers with Ball with Ventilation Hole


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