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Date Published:Mar. 24. 2015

Coupling for special environment

Couplings that can be used in special environments such as clean room, vacuum, high temperature (80 ° C or higher) are available.

Type Slit Coupling Oldham Coupling Disk Coupling
Shape クリーン・真空・耐熱対応カップリング - スリットタイプ(SUS316L) - クランピングタイプ クリーン・真空・耐熱対応カップリング - スリットタイプ(SUS316L) - クランピングタイプ クリーン・真空・耐熱対応カップリング - スリットタイプ(PEEK) - クランピングタイプ クリーン・真空・耐熱対応カップリング - オルダムタイプ(ベスペル) - クランピングタイプ クリーン・真空・耐熱対応カップリング- オルダムタイプ(PEEK) - クランピングタイプ フレキシブルカップリング-ディスクタイプ-クランピングタイプ フレキシブルカップリング-シングルディスクタイプ-クランピングタイプ
Part Number XSTS XWSS MSXP MOHS MOP XBWS XBSS
Material SUS316L SUS316L PEEK SUS303
Vespel**
SUSXM7
A2017
PEEK
SUSXM7
SUS303
SUSXM7
SUS303
SUSXM7
Cleaning method Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning
Low particle
Vacuum-supported
Less outgas
Heat resistant
Chemical resistant
Zero Backlash    
High torque      
High torsional rigidity          
Allowable Misalignment  

:Excellent ○:Very good △:Abrasion powder may be produced
XBWS XBSS are uncleaned products.Clean washing and clean packaging are available upon request.
**VESPEL is a registered trademark of U.S. company DuPont.


● Low particle

The amount of attached particle is ultra low.
This is directly available in a cleanroom. This does not bring contaminated matters into a cleanroom.

● Vacuum-supported

A material with which outgas production in a vacuum environment is small is used.
If misalignment becomes larger due to vacuum pressure difference,MOHS MOP, for which larger misalignment is permitted, are recommended.
真空対応

● Less outgas

Materials with which production of outgas that causes chemical contamination under atmospheric environment is small are used.

● Heat resistant

This is available even in an environment of high temperature( 80℃ or higher)
Elongation or deflection of a shaft associated with thermal expansion may increase misalignment. If misalignment becomes larger, MOHS MOP, for which larger misalignment is permitted, is recommended.

● Chemical resistant

Materials superior in chemical resistance are used.

Analysis of outgas

アウトガスの分析_1
アウトガスの分析_2

*Both inorganic gas and organic gas are not more than the lower limit of determined amount and are not detected.

Change in static torsional stiffness due to temperature

耐熱_1
耐熱_2
耐熱_3
耐熱_4
耐熱_5

This is a value for each product under the condition where the static torsional stiffness at 20°C is 100%.

Product Introduction Heat resistance/corrosion resistance Cleanroom/vacuum/non-magnetic Semiconductor Manufacturing Equipment Medical equipment FA Devices Couplings