Date Published:May. 10. 2020
Couplings that support minimal outgassing and large eccentricity are required 【High sanitation / corrosion-resistant / clean】
PEEK spacer type Oldham couplings are ideal
In-line vacuum vapor deposition equipment
Couplings with minimal outgassing yet large allowable misalignment, ideal for connecting equipment within a vacuum chamber to an external drive. We have Oldham couplings using PEEK spacers to support clean/vacuum environments with heat resistance.
Recommended product
Cleanroom / Vacuum / Heat Resistant Couplings - Oldham Type (PEEK) MOP
Issue/case studies
Heat resistance/corrosion resistance
Semiconductor Manufacturing Equipment
Medical Equipment
FA Devices
Solution samples
Couplings