Date Updated:Feb. 17. 2025
No. 5: Solving common problems inside equipment
Semiconductor manufacturing equipment interior: Overall
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①Tools that can be used even in narrow working spaces
②Tools that can be used even in locations where magnetization must be avoided
③Screws that will not affect communication
④Washers for powerful connections between equipment
⑤High-speed control of raising/lowering shafts, suppressing hunting
⑥Improved coupling insulation properties
⑦Screws that can be used even in limited spaces
⑧Magnetic shield (permalloy shield) must be fixed
Semiconductor manufacturing equipment interior: vacuum chambers
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①Tightening screws in tight spaces where retention by hand is not possible
②Washer fall-out prevention
③Screws that can retain wafers
④Screws that retain high strength even in high-temperature environments
⑤Galling/seizing prevention for stainless steel screws
⑥Protecting screws from chemicals
⑦Reinforcement for places where bolts are frequently removed
⑧Increased degree of vacuum in equipment
Problem Solution Examples by Semiconductor Manufacturing Process
Problem solution examples are introduced by semiconductor manufacturing process.Pre-process here
Post-process here
"The Semiconductor Industry and NBK" back numbers
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Product Introduction
Issue/case studies
Improved productivity/workability
Compact/space-saving/lightweight
High strength/high rigidity
Heat resistance/corrosion resistance
Cleanroom/vacuum/non-magnetic
Semiconductor Manufacturing Equipment
The Semiconductor Industry and NBK
Couplings
Special Screws
Machine Elements